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Trends in the Development of Machinery and Associated Technology
GDOES is a rapid depth profiling technique. This analysis is destructive and there is a formation of sputter craters on the sample surface. In this work the depth profiling method GDOES is used for determining the thickness of TiAlN coating after determining the sputtering rate, as well as the crater microstructure. The GDOES depth profiles were measured by means of spectrometer GDS 750, Leco. The obtained data were compared with the thickness values obtained from the optical microscopy and thefatcat:x5bymva7mrbardpnmtm4xcyj3a