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Template Transfer Nanoimprint for Uniform Nanopores and Nanopoles
2016
Journal of Nanomaterials
A new methodology is developed for the fabrication of nanostructures on substrate based on anodized Al2O3(AAO) porous template transfer process. It includes (1) forming amorphous alloy, negative UV-resist resin (i.e., SU-8), or PMMA (polymethylmethacrylate) plate nanorod arrays by hot-press molding amorphous alloy, negative UV-resist resin (i.e., SU-8), or PMMA plate into the anodized Al2O3porous substrates; (2) removing AAO templates by chemical etching process after suitable posttreatment
doi:10.1155/2016/9354364
fatcat:zeilyo6horekjbzzgm6zvlxl5e