Sol-gel-derived lead-magnesium-niobium titanate thin films for ultrahigh-value capacitor applications

M Çopuroğlu, S O'Brien, B Malič, B Kužnik, M Kosec, X Zhu, E Defaÿ, R Winfield
2010 IOP Conference Series: Materials Science and Engineering  
A Pb(Mg 0.33 Nb 0.67 ) 0.65 Ti 0.35 O 3 material system was synthesized by the sol-gel method; thin films were deposited via the spin-coating technique, and processed using the rapid thermal annealing. Effects of preparation parameters, such as annealing temperature and atmosphere, on the phase composition, microstructure and electrical properties were identified. Morphologically uniform and crack-free films were obtained. Among the obtained films, the highest k value was found to be 1425 for
more » ... nd to be 1425 for the 380 nm thick film that was annealed at 750 °C in O 2 indicating the suitability of this material system for ultrahigh-value capacitor applications.
doi:10.1088/1757-899x/8/1/012007 fatcat:4alps2zhtnfabiatsnwbtudnfa