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A Pb(Mg 0.33 Nb 0.67 ) 0.65 Ti 0.35 O 3 material system was synthesized by the sol-gel method; thin films were deposited via the spin-coating technique, and processed using the rapid thermal annealing. Effects of preparation parameters, such as annealing temperature and atmosphere, on the phase composition, microstructure and electrical properties were identified. Morphologically uniform and crack-free films were obtained. Among the obtained films, the highest k value was found to be 1425 fordoi:10.1088/1757-899x/8/1/012007 fatcat:4alps2zhtnfabiatsnwbtudnfa