N-polar GaN epitaxy and high electron mobility transistors

Man Hoi Wong, Stacia Keller, Nidhi, Sansaptak Dasgupta, Daniel J Denninghoff, Seshadri Kolluri, David F Brown, Jing Lu, Nicholas A Fichtenbaum, Elaheh Ahmadi, Uttam Singisetti, Alessandro Chini, Siddharth Rajan (+3 others)
2013 Semiconductor Science and Technology  
This paper reviews the progress of N-polar (000 1) GaN high frequency electronics that aims at addressing the device scaling challenges faced by GaN high electron mobility transistors (HEMTs) for radio-frequency and mixed-signal applications. Device quality (Al, In, Ga)N materials for N-polar heterostructures are developed using molecular beam epitaxy and metalorganic chemical vapor deposition. The principles of polarization engineering for designing N-polar HEMT structures will be outlined.
more » ... ill be outlined. The performance, scaling behavior and challenges of microwave power devices as well as highly-scaled depletion-and enhancement-mode devices employing advanced technologies including self-aligned processes, n+ (In,Ga)N ohmic contact regrowth and high aspect ratio T-gates will be discussed. Recent research results on integrating N-polar GaN with Si for prospective novel applications will also be summarized.
doi:10.1088/0268-1242/28/7/074009 fatcat:tpxothadwneufjr5znkmg53s6e