New Method for Nanosecond Laser Machining

Cinthya Toro
2012 Journal of Laser Micro/Nanoengineering  
The technique of micro-machining assisted by laser is the most recent and flexible process for the design of complex devices. To be able to micro-machine hard materials with precision it is necessary to study the parameters that control and limit the capabilities of this laser process. Several articles have shown that if it applies a lot of energy in a localized area there are hot-affected zones (HAZ), even when a femtosecond laser is used. Hence, the challenge in the laserbased micromachining
more » ... s to improve the quality of machining, i.e. depleting the HAZ in the prototypes. In this work, changing the optical properties of the substrate, good quality silicon micro-machining has been obtained with a nanosecond Q-switched laser.
doi:10.2961/jlmn.2012.03.0007 fatcat:5pnpwjjahnb3niecbxfdrwdhoy