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Effects of acoustic noise on optical tools
1999
Optomechanical Engineering and Vibration Control
Optical tools respond to internal vibration that can be excited by the external acoustic environment. The degree to which this occurs depends on many factors, but primarily the correspondence between the resonance characteristics of the tool and the frequency content of the acoustic environment in which it operates. Adverse noise environments, such as those often found in operating laboratories and microelectronics fabrication facilities, can affect the threshold of resolution achievable by the
doi:10.1117/12.363786
fatcat:hdvawdsfcze65dtlbeyy4qec3e