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Study on the suitability of ZnO thin film for dynamic pressure sensing application
2020
International Journal on Smart Sensing and Intelligent Systems
ZnO thin films were prepared by RF reactive magnetron sputtering on phynox substrate at room temperature for four different thicknesses by varying deposition duration. The structural and morphological properties and composition of these films were characterized using XRD, SEM, and EDS, respectively. Suitability of these films for dynamic pressure sensing applications and the effect of film thickness on dynamic pressure sensing were evaluated experimentally using a shock tube equipment. Shock
doi:10.21307/ijssis-2020-002
fatcat:mvt2wmazybaobdnsrlmbm7tbiy