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We report on the evaluation of different pulse durations between 230 fs and 5 ps on the layer-wise ablation of fused silica. In an initial step, the polished samples are roughened by scanning the laser across the surface and ablating hatches consisting of parallel lines, where chipping and cracking is present for longer pulse durations. The ablation behavior of the further layers showed two ablation regimens with respect to the laser fluence for all pulse durations. Furthermore, for longerdoi:10.2961/jlmn.2018.03.0025 fatcat:hzogaeez2zfclhcgo4sot2a6n4