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Epitaxial PbSc 0.5 Ta 0.5 O 3 (001) films with an epitaxial LaNiO 3 bottom electrode were deposited on CeO 2 /yttria-stabilized zirconia-buffered Si (100) substrates. Crystal orientation, in-plane and out-of-plane lattice parameters, surface morphology, and microstructure were analyzed by X-ray diffraction, X-ray reciprocal lattice mapping measurements, atomic force microscopy, and transmission electron microscopy, respectively. XRD superstructure reflections indicate that the films are cationdoi:10.1063/1.4819384 fatcat:x5rqdg5iube4zk5uwo6c2aajfy