Application of Coaxial Ion Gun for Film Generation and Ion Implantation

Mikio Takatsu, Tomohiko Asai, Satoshi Kurumi, Kaoru Suzuki, Hideharu Hirose, Shigeyuki Masutani
2014 Proceedings of the 12th Asia Pacific Physics Conference (APPC12)   unpublished
A magnetized coaxial plasma gun (MCPG) has been studied mostly in the field of nuclear fusion research for particle and magnetic helicity injection, and spheromak formation [1]. In this study, MCPG is utilized for a deposition of high-melting-point metals. In the developed method, a center electrode of MCPG consists of multiple pins made of target conductive materials (Fig.
doi:10.7566/jpscp.1.015086 fatcat:wd7yqgarxfe4ze3ih5njsf6vie