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Application of Coaxial Ion Gun for Film Generation and Ion Implantation
2014
Proceedings of the 12th Asia Pacific Physics Conference (APPC12)
unpublished
Preserved Fulltext
A magnetized coaxial plasma gun (MCPG) has been studied mostly in the field of nuclear fusion research for particle and magnetic helicity injection, and spheromak formation [1]. In this study, MCPG is utilized for a deposition of high-melting-point metals. In the developed method, a center electrode of MCPG consists of multiple pins made of target conductive materials (Fig.
doi:10.7566/jpscp.1.015086
fatcat:wd7yqgarxfe4ze3ih5njsf6vie