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Modeling of ions energy distribution profile of electronegative plasma discharges with an efficient Monte Carlo simulator
[article]
1998
arXiv
pre-print
The crucial role that Ions Energy Distribution Function (IEDF) at the electrodes plays in plasma processing of semiconductor materials demands that this quantity be predicted with high accuracy and with low noise levels in any plasma simulator. In this work, an efficient Particle-in-cell/Monte-Carlo (PIC/MC) simulator is developed to model IEDF at the electrodes of electronegative plasma discharges. The simulator uses an effective method to increase the number of MC particles in regions of low
arXiv:physics/9810026v2
fatcat:oztvhn6k4rgihf3jphjaawxcfi