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Proximity effect correction calculations by the integral equation approximate solution method

1986
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Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena
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The task of successfully dealing with the proximity effect problem involves many aspects, all of which must be dealt with in a reasonably satisfactory manner. If one chooses to correct for the proximity effect by doing dose compensation, one major task is the solution of the i.ntegral equation which describes the resultant exposure in terms ofthe incident flux of electrons. One well known method is the self-consistent method. This paper describes a method which provides a relatively accurate

doi:10.1116/1.583369
fatcat:aglzhqjuqraytohaw3iq2d7ie4