Artificial Neural Networks to Predict Sheet Resistance of Indium-Doped Zinc Oxide Thin Films Deposited via Plasma Deposition

Ali Salimian, Arjang Aminishahsavarani, Hari Upadhyaya
2022 Coatings  
We implemented deep learning models to examine the accuracy of predicting a single feature (sheet resistance) of thin films of indium-doped zinc oxide deposited via plasma sputter deposition by feeding the spectral data of the plasma to the deep learning models. We carried out 114 depositions to create a large enough dataset for use in training various artificial neural network models. We demonstrated that artificial neural networks could be implemented as a model that could predict the sheet
more » ... sistance of the thin films as they were deposited, taking in only the spectral emission of the plasma as an input with the objective of taking a step toward digital manufacturing in this area of material engineering.
doi:10.3390/coatings12020225 fatcat:rfqax4fezre47lz4mmpjb2jg6i