Mechanism of low-temperature synthesis of carbon films by photo enhanced chemical vapor deposition
光CVDによる炭素膜の低温合成における成膜機構

Tetsuji Yasuda, Hiroshi Komiyama
1990 Kagaku kogaku rombunshu  
doi:10.1252/kakoronbunshu.16.259 fatcat:owdmp6ogprdb7pw5n4vwsii57m