窒化ハフニウムフィールドエミッタアレイの耐久性の評価
Durability Evaluation of Hafnium Nitride Field Emitter Array

Yuko MIYATA, Taro KANZAWA, Yasuhito GOTOH, Hiroshi TSUJI, Junzo ISHIKAWA
2008 Journal of the Vacuum Society of Japan  
doi:10.3131/jvsj2.51.162 fatcat:p7ycrh3qljbc7kwdmnfwqgxfky