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Synthesis and Nanoscale Characterization of LiNbO3 Thin Films Deposited on Al2O3 Substrate by RF Magnetron Sputtering under Electric Field
2016
Journal of Nano- and Electronic Physics
LiNbO3 thin films were deposited on Al2O3 substrates by RF-magnetron sputtering with in-situ electric field to study the self-polarization effect. The films have been characterized crystallographically by x-ray diffraction, and morphologically by atomic force microscopy. The films contain crystallites of LiNbO3 with preferable orientation [012] along the normal to the Al2O3 substrate surface (012). Piezoresponse force microscopy was used to study vertical and lateral polarization direction in
doi:10.21272/jnep.8(4(1)).04025
fatcat:2zhxvcshwzdptkhh3swvikb3yy