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Ion-beam sputtering has been used to achieve the growth of FePt thin films and C/FePt granular multilayers at room temperature. The effects of thermal annealing on the structural and magnetic properties have been investigated by transmission electron microscopy, Rutherford backscattering spectrometry, grazing incidence X-ray diffraction, grazing incidence small-angle X-ray scattering, and magnetization measurements. The as-deposited films and granular multilayers show FePt grains (10-20 nm anddoi:10.1063/1.1571230 fatcat:dvp6bpugozgfzjq33g2k4p6fhi