2D materials have attracted tremendous attention for a variety of properties such as ultra-low body thickness, ultra-high mobility, and tunable bandgap. These unique merits of the 2D materials bring in the significant improvements and new perspectives in the digital CMOS scaling, analog performance, as well as the 3D integration of wafer stacking. In this thesis, we explore van der Waals materials for future CMOS technologies. Chapter 2 introduces a compatible and a single-step method for

more »

... sizing high-mobility monolayer graphene (MLG) in merely a few minutes by means of plasma-enhanced chemical vapor deposition (PECVD) techniques without the need of active heating. This environment enables graphene growth on different surfaces at relatively low temperatures, which paves ways to a CMOS-compatible approach to graphene synthesis. Chapter 3 describes the development of a synthesis method that controls the growth of large-area h-BN films from monolayer to 30 atomic layers, and summarizes the characterizations of the properties of these h-BN films that demonstrate the high-quality of these materials. New degrees of freedom possess the immense potential and attract huge attentions as the imminent end of "Moore's Law". Compared with the traditional charge degree of freedom, spin and valley are the other two additional internal degree of freedom in solid-state electronics which enable the spintronic and valleytronic devices with high integration density, fast processing speed, low power dissipation, and non-volatility. Monolayer transition-metal dichalcogenides (TMDCs) in the 2H-phase are semiconductors promising for opto-valleytronic and opto-spintronic applications because of their strong spin-valley coupling. In chapter 4, we report detailed studies of opto-valleytronic properties of heterogeneous domains in CVD-grown monolayer WS₂ single crystals. By illuminating WS₂ with off-resonance circularly-polarized light and measuring the resulting spatially resolved circularly-polarized emission (Pcirc), we find large [...]