Optimization of Electrical/Optical Properties of ITO/Al Based Reflector for Vertical-type UV LEDs via SF6 Plasma Treatments
불소계열 플라즈마 처리를 통한 수직형 UV LED용 ITO/Al 기반 반사전극의 전기적/광학적 특성 최적화

Ki-Seob Shin, Dong-Yoon Kim, Tae-Geun Kim
2011 Journal of the Korean Institute of Electrical and Electronic Material Engineers  
We optimize electrical and optical properties of thermal and SF6 plasma treated indium tin oxide (ITO)/Al based reflector for high-power ultraviolet (UV) light-emitting diodes (LEDs). After thermal and SF6 plasma treatments of ITO/Al reflector, the specific contact resistance decreased from
doi:10.4313/jkem.2011.24.11.911 fatcat:an3qthrbfjg7fo5zpyryt5bmju