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Surface structure analysis of micropatterned Si(110) by nano-beam Weissenberg Reflection High-Energy Electron Diffraction
ナノビームW-RHEEDによるマイクロパターンを施したSi(110)基板の表面構造解析

Sohei Nakatsuka, Taishi Imaizumi, Tadashi Abukawa, Azusa N. Hattori, Hidekazu Tanaka
2019 Abstract book of Annual Meeting of the Japan Society of Vacuum and Surface Science  

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doi:10.14886/jvss.2019.0_1ca09s fatcat:p23vjikw25gdhcf34vcxupaxri
lang:ja
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Sohei Nakatsuka, Taishi Imaizumi, Tadashi Abukawa, Azusa N. Hattori, Hidekazu Tanaka. "Surface structure analysis of micropatterned Si(110) by nano-beam Weissenberg Reflection High-Energy Electron Diffraction." Abstract book of Annual Meeting of the Japan Society of Vacuum and Surface Science 2019.0 (2019) 1Ca09S