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2007 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems
In this paper, we present our recent works on the fabrication and testing of a novel MEMS (micro electro mechanical systems) vacuum sensor based on field emission of silicon tips array. The prototype vacuum sensor had been fabricated and tested under some conditions. It worked as a diode, having the voltage as the input and field emission current as output, with threshold voltage of approximate 7V and breakdown voltage of about 265V. When the pressure fell from 0.037Pa to 0.0077Pa, the fielddoi:10.1109/nems.2007.352261 fatcat:5i74o4jdgvh3tdil27ydnfpo5y