Studies on MEMS Vacuum Sensor Based on Field Emission of Silicon Tips Array

Weiren Wen, Lingyun Wang, Junchuan Gao, Daoheng Sun
2007 2007 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems  
In this paper, we present our recent works on the fabrication and testing of a novel MEMS (micro electro mechanical systems) vacuum sensor based on field emission of silicon tips array. The prototype vacuum sensor had been fabricated and tested under some conditions. It worked as a diode, having the voltage as the input and field emission current as output, with threshold voltage of approximate 7V and breakdown voltage of about 265V. When the pressure fell from 0.037Pa to 0.0077Pa, the field
more » ... 077Pa, the field emission current increased from80.3ttA to 96.3ttA. This work suggests a potential application of field emission to vacuum sensor. vacuum sensor. Some similar works have also been done by someone others [6-8]. II. PROCESS AND TESTING SYSTEM A. Process The silicon tips array was fabricated on the N-type <100> silicon wafer, which must be cleaned by silicon standard cleaning process before employed it. The fabrication process of silicon tips array was shown in Fig. 1 .
doi:10.1109/nems.2007.352261 fatcat:5i74o4jdgvh3tdil27ydnfpo5y