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Peculiarities of Usage Diamond-Like Carbon Films as Antireflection Coating
2020
Electronic and Acoustic Engineering
The series of three diamond-like carbon films was fabricated using Plasma -Enhanced Chemical Vapor Deposition setup designed for deposition of amorphous silicon films. The deposited films were analyzed by Spectroscopic ellipsometer Semilab SE-2000 in terms of optical properties. All the measurements were analyzed and modeled by the Fresnel equations. Three parameters were identified: refractive index, extinction index, and thickness. The range of these values indicates that the films can be
doi:10.20535/2617-0965.2020.3.3.199800
fatcat:isameamcwffitm7findpafvsta