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Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97)
A new design of bulb-lens for emitted light collimation is proposed and demonstrated, and a vibration-sensor as an optical fiber sensor combined with an optical fiber with the bulb-lens for vibration and the silicon micro-fabrication technique, is also propased and demonstrated. Nearly flat frequency dependence of the optical output was obtained in the frequency range between observed 40 and 1200 Hz under the constant acceleration. Resolution (or equivalent noise level) of 0.3 m/s2 is attaineddoi:10.1109/sensor.1997.635445 fatcat:ldkwegdyvzecboj6ndhmdepwry