Controlled oxygen vacancy induced p-type conductivity in HfO2−x thin films

Erwin Hildebrandt, Jose Kurian, Mathis M. Müller, Thomas Schroeder, Hans-Joachim Kleebe, Lambert Alff
2011 Applied Physics Letters  
We have synthesized highly oxygen deficient HfO_2-x thin films by controlled oxygen engineering using reactive molecular beam epitaxy. Above a threshold value of oxygen vacancies, p-type conductivity sets in with up to 6 times 10^21 charge carriers per cm3. At the same time, the band-gap is reduced continuously by more than 1 eV. We suggest an oxygen vacancy induced p-type defect band as origin of the observed behavior.
doi:10.1063/1.3637603 fatcat:5g3qwk24frdxjeswo3jlyqcetu