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Smart Sensors, Actuators, and MEMS II
The design and fabrication of micro gratings and polarization beam splitters for potential use in micro optical pickups are presented. Silicon nitride is used as the optical material for its low absorption in the visible wavelength. The micro components are framed by a pop-up poly-silicon mechanism as in the standard surface micromachining technology. The micro grating is a binary phase grating. The diffraction ratio between 4 and 10 can be achieved provided that the duty cycle is between 0.4doi:10.1117/12.608636 fatcat:jzld7minwjh5rpjg3a5asrbeie