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Diffractive imaging of the dumbbell structure in silicon by spherical-aberration-corrected electron diffraction
2008
Applied Physics Letters
The dumbbell structure in crystalline silicon as known with the separation of 0.136 nm has been reconstructed clearly by diffractive imaging using an electron beam. The spatial resolution in the result is estimated at about 0.1 nm. By utilizing the selected area diffraction technique in a spherical-aberration-corrected transmission electron microscope, one can reconstruct nanostructures with atomic resolution, even if they are not surrounded by empty space such as localized structures embedded
doi:10.1063/1.3003582
fatcat:hftgjdiq5nhp5ifkbvbwz2qwxi