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All-solid-state Li ion secondary battery, consisting of multiple layers (Li anode / a poly methacrylate acetate (PMMA) electrolyte / LiMn 2 O 4 cathode), is prepared using Si very-large-scale integration technologies. The synthesized materials are characterized by means of X-ray diffraction (XRD) anddoi:10.15002/00011091 fatcat:6ddxflklfjf25odstwawxawypi