Large yield production of high mobility freely suspended graphene electronic devices on a polydimethylglutarimide based organic polymer

Nikolaos Tombros, Alina Veligura, Juliane Junesch, J. Jasper van den Berg, Paul J. Zomer, Magdalena Wojtaszek, Ivan J. Vera Marun, Harry T. Jonkman, Bart J. van Wees
2011 Journal of Applied Physics  
The recent observation of fractional quantum Hall effect in high mobility suspended graphene devices introduced a new direction in graphene physics, the field of electron-electron interaction dynamics. However, the technique used currently for the fabrication of such high mobility devices has several drawbacks. The most important is that the contact materials available for electronic devices are limited to only a few metals (Au, Pd, Pt, Cr and Nb) since only those are not attacked by the
more » ... acked by the reactive acid (BHF) etching fabrication step. Here we show a new technique which leads to mechanically stable suspended high mobility graphene devices which is compatible with almost any type of contact material. The graphene devices prepared on a polydimethylglutarimide based organic resist show mobilities as high as 600.000 cm^2/Vs at an electron carrier density n = 5.0 10^9 cm^-2 at 77K. This technique paves the way towards complex suspended graphene based spintronic, superconducting and other types of devices.
doi:10.1063/1.3579997 fatcat:r65rja5e35b5bla32gnutqxani