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We investigate a hierarchical surface structuring process to reduce the optical reflectance of monocrystalline Si solar cells to below the reflectance of state-of-the-art alkaline texturing. First, alkaline texturing is performed, yielding random pyramids with a few micrometers in size. Second, plasma etching forms step-shaped structures smaller than the wavelength of visible light. Eventually, the surface morphology is formed by <111> planes with many steps, edges and inverted pyramids in adoi:10.1016/j.egypro.2015.07.114 fatcat:qtleqs5dt5c4pon5hgku34khbe