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Electrical and Optical Properties of the AlN/Cu/AlN Multilayer Films by Sputtering
スパッタ法により形成したAlN/Cu/AlN積層膜の電気・光学特性

Tomohiro MIKAMI, Sinpei SIBAO, Singo DATE, Keiji IWAI, Soichi OGAWA
2003 Shinku  

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doi:10.3131/jvsj.46.276 fatcat:xxplahbeubcnpd724fxh2wqece
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Tomohiro MIKAMI, Sinpei SIBAO, Singo DATE, Keiji IWAI, Soichi OGAWA. "Electrical and Optical Properties of the AlN/Cu/AlN Multilayer Films by Sputtering." Shinku 46.3 (2003) 276-279