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Design, Fabrication, and Testing of a Hybrid CMOS/PDMS Microsystem for Cell Culture and Incubation
2007
IEEE Transactions on Biomedical Circuits and Systems
We discuss the design, fabrication, and testing of a hybrid microsystem for stand-alone cell culture and incubation. The micro-incubator is engineered through the integration of a silicon CMOS die for the heater and temperature sensor, with multilayer silicone (PDMS) structures namely, fluidic channels and a 1.5-mm diameter 12-L culture well. A 90-m-thick PDMS membrane covers the top of the culture well, acting as barrier to contaminants while at the same time allowing the cells to breath and
doi:10.1109/tbcas.2007.893189
pmid:23851516
fatcat:a7duouqdhratndxpj4xkjlmqj4