Design, Fabrication, and Testing of a Hybrid CMOS/PDMS Microsystem for Cell Culture and Incubation

Jennifer Blain Christen, Andreas G. Andreou
2007 IEEE Transactions on Biomedical Circuits and Systems  
We discuss the design, fabrication, and testing of a hybrid microsystem for stand-alone cell culture and incubation. The micro-incubator is engineered through the integration of a silicon CMOS die for the heater and temperature sensor, with multilayer silicone (PDMS) structures namely, fluidic channels and a 1.5-mm diameter 12-L culture well. A 90-m-thick PDMS membrane covers the top of the culture well, acting as barrier to contaminants while at the same time allowing the cells to breath and
more » ... change gases with the ambient environment. The packaging for the microsystem includes a flexible polyimide electronic ribbon cable and four fluidic ports that provide external interfaces to electrical energy, closed-loop sensing and electronic control as well as solid and liquid supplies. The complete structure has a size of (2.5 2.5 0.6) cm 3 . We have employed the device to successfully culture BHK-21 cells autonomously over a three day period in ambient environment.
doi:10.1109/tbcas.2007.893189 pmid:23851516 fatcat:a7duouqdhratndxpj4xkjlmqj4