23aXB-3 Observation of surface structure induced by diffused Ru atoms on Si surface
23aXB-3 Si表面上におけるRuの拡散と表面構造の観察(23aXB 表面界面構造,領域9(表面・界面,結晶成長))

N. Kobayashi, M. Toramaru, S. Ohno, K. Shudo, Y. Miyamoto, N. Kawamura
2008 Meeting Abstracts of the Physical Society of Japan (Nihon Butsuri Gakkai koen gaiyoshu)  
doi:10.11316/jpsgaiyo.63.2.4.0_849_3 fatcat:h3wqsrsgu5fwjgmggkns6kv57e