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We have proposed and evaluated the novel three-dimensional on-chip variable inductor that is fabricated using microelectromechanical systems technology. The variable inductor was made of thin film metallic glass, Pd 76 Cu 7 Si 17 , that has high flexibility. Since the thin film metallic glass has high elasticity, the height of the three-dimensional spiral inductor can be changed, resulting in the change of inductance. The fabricated inductor has the inductance of 3.64-3.74 nH due to the changedoi:10.1143/jjap.42.2190 fatcat:rxzrqcbsgfderbpeuzywwzkpjq