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X-ray lenses fabricated by deep x-ray lithography
Design and Microfabrication of Novel X-Ray Optics
Refractive x-ray lenses have been fabricated using deep x-ray lithography. Lenses were produced directly in 1-to 6-mm-thick sheets of polymethylmethacrylate (PMMA) with as many as 100 cylindrical lenses along the optical axis. The fabrication process consists of exposing the PMMA sheets to highenergy synchrotron radiation through a mask of 50-micron-thick gold on silicon and subsequent development in ketone. The lenses are suitable for use in synchrotron radiation from a bending magnet at thedoi:10.1117/12.451021 fatcat:op4ywrajwrgqliqhuq3zhf7b7q