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Mechanical Behaviors of Electrostatic Microbeams with Nonideal Supports
Shock and Vibration
Deviation of the actual system from the ideal supporting conditions caused by micromachining errors and manufacturing defects or the requirement of innovative design and optimization of microelectromechanical systems (MEMS) make the nonideal boundary in the micro-/nanoresonator system receive wide attention. In this paper, we consider the neutral plane tension, fringing field, and nonideal boundary factors to establish a continuum model of electrostatically driven microbeam resonators. Thedoi:10.1155/2020/4507280 fatcat:ojfpaanmtnhhhcqfmh6bymjnmm