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Pelapisan Logam Menggunakan Plasma
2019
Jurnal Intake : Jurnal Penelitian Ilmu Teknik dan Terapan
One of the ways to improve the quality of the material is by using the thin layer deposition techniques on the material surface. DC magnetron sputtering is one of the methods frequently used to do so. This method uses plasma to create a thin layer on the material's surface. In this research, flyback circuit is used to generate plasma. This research examines the effects of electrodes' gap and sputtering process time on the width of marks that appear on the substrate's surface. The electrodes'
doi:10.48056/jintake.v10i2.57
fatcat:cwtplluxjrhfzfg6nn7vaguknm