In this presentation, a quantitative study of the patterning of graphene nanoplates using Atomic force microscopy (AFM) based nanolithography was performed. Nanoscale trenches with controllable width and depth are created on graphene nanoplates by employing force-controlled nanomechanical cutting and voltage-controlled local anodic oxidation (LAO) technique, respectively. During cutting process, the effect of the applied cutting force and LAO voltage on trench dimension is quantitatively

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... gated. By applying the well-defined cutting parameters, graphene nanoribbons with desirable width can be fabricated effectively. In addition, the electric field effect characteristic of the graphene nanoplate after cutting is measured, which shows that the electronic properties vary between the patterned graphene nanoribbons with different widths. The electrical properties of the graphene nanoribbons are controlled using the pattern process.