Test structure for precise statistical characteristics measurement of MOSFETs

Y. Shimizu, M. Nakamura, T. Matsuoka, K. Taniguchi
Proceedings of the 2002 International Conference on Microelectronic Test Structures, 2002. ICMTS 2002.  
doi:10.1109/icmts.2002.1193170 fatcat:7cipesk7kjf6jgj35sur7s4qre