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Fabrication of a Y-splitter Modulator Embedded in LiNbO3 with a Femtosecond Laser
2010
Journal of Laser Micro/Nanoengineering
We describe a technique to integrate embedded microelectrodes and optical waveguides in Lithium niobate (LiNbO 3 ) using a femtosecond laser, and a Y-splitter modulator was demonstrated. The Y-splitter was fabricated by femtosecond laser direct writing and the embedded microelectrodes were fabricated by combining femtosecond laser ablation with selective electroless plating. The embedded microelectrodes give rise to homogeneous electric field across the optical waveguides, which could result in
doi:10.2961/jlmn.2010.01.0006
fatcat:ikklrdoghjehbllyoupeq27rge