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A NEW SINGLE DISK SPUTTERING SYSTEM FOR MANUFACTURING OF MO-MEDIA
1995
Journal of the Magnetics Society of Japan
Preserved Fulltext
A new single-disk sputtering system for the production of magneto-optical disks is presented. It features 7 process stations for multi-step static deposition which. are arranged vertically on a circular path, and which can be equipped with cathodes or an etching station according to the specific needs. Special emphasis is put on the design of the cathodes being completely axialsymmetric in geometry and the sputter gas management. Results from DC-reactive sputtering for fast deposition of
doi:10.3379/jmsjmag.19.s1_65
fatcat:6xihhbg37vezfgwzhinva5wsnm