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Surface micromachined glass and polysilicon microchannels using MUMPs

Ki Bang Lee, Liwei Lin
The Sixteenth Annual International Conference on Micro Electro Mechanical Systems, 2003. MEMS-03 Kyoto. IEEE  

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MUMPs (Multi-User MEMS Process) based, surface micromachined glass and polysilicon microchannels are fabricated by means of surface micromachining. The prototype glass microchannels are made of a 0.75um-thick PSG2 layer on top with cross section of 70µm in width and 4µm in height. The polysilicon microchannel are made of a 2µm-thick poly1 layer with a cross section of 70µm in width and 2µm in height. Both microchannels have been tested to transport and contain water by means of surface tension
more » ... orce. Because these microchannles are fabricated strictly from the foundry-based micromachining process, they present opportunities for economical prototyping process and provide great potential to be integrated with other micromachined microfluidic systems using foundry-based services for device applications, such as DNA chip and labon-a-chip.
doi:10.1109/memsys.2003.1189815 fatcat:74glhtmd4bdsde3gjv4dboxwdm
Citation

Ki Bang Lee, Liwei Lin. "Surface micromachined glass and polysilicon microchannels using MUMPs." The Sixteenth Annual International Conference on Micro Electro Mechanical Systems, 2003. MEMS-03 Kyoto. IEEE