Single-sided lapping is one of the most effective planarization technologies. The process has relatively complex kinematics and it is determined by a number of inputs parameters. It has been noted that prediction of the tool wear during the process is critical for product quality control. To determine the profile wear of the lapping plate, a computer model which simulates abrasive grains trajectories was developed in MATLAB. Moreover, a data-driven technique was investigated to indicate the

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... tionship between the tool wear uniformity and lapping parameters such as the position of conditioning rings and rotational speed of the lapping plate and conditioning rings.