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A 20-50 GHz RF MEMS single-stub impedance tuner
2005
IEEE Microwave and Wireless Components Letters
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A novel radio-frequency (RF) microelectromechanical system (MEMS) single-stub impedance tuner has been developed. The design is based on combining the loaded line technique with the single-stub topology to obtain wide impedance coverage with high 0 MAX . The tuner consist of ten switched MEMS capacitors producing 1024 (2 10 ) different impedances. The design has been optimized for noise parameter and load-pull measurements of active devices and shows excellent measured impedance coverage over
doi:10.1109/lmwc.2005.845690
fatcat:5dfxz677mre3pizbisvguzxpxm