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On-Chip Tests for the Characterization of the Mechanical Strength of Polysilicon
2022
The 9th International Electronic Conference on Sensors and Applications
unpublished
Preserved Fulltext
This article is an open access article distributed under the terms and conditions of the Creative Commons Attribution (CC BY) license (https:// creativecommons.org/licenses/by/ 4.0/).
doi:10.3390/ecsa-9-13363
fatcat:kq4i34yhevdedow23gign6fani