With widely application of nanomanipulation, the design requirements of nanomanipulation control system is higher and higher. To improve the control precision of nano-components, it is important to do research on closed-loop control method for nanomanipulation. The piezoelectric ceramic actuator has the inherent characteristic of hysteresis, creep and nonlinear. Attocube is adopted as piezoelectric ceramic actuator in this system. Aiming at the designed nanomanipulation system based on

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... the closed-loop nanomanipulation control method based on fuzzy PID is studied. Based on the simplified modeling of piezoelectric devices and its displacement model, the controller of nanomanipulation system is designed and its simulation based on Matlab is conducted. Simulational results prove the effectiveness of the method.