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The advances in cross-sectional scanning tunneling microscopy and spectroscopy (XSTM/XSTS) are reviewed with emphasis on the structural and spectroscopic studies of semiconductor heterostructures on an atomic or nanometer scale. The unparalleled chemical and electronic sensitivities as well as spatial resolution of XSTM/XSTS are addressed. Examples shown here include recent results of cation/anion selective imaging, observations of individual impurities, interface roughness and asymmetry, banddoi:10.3131/jvsj.38.1009 fatcat:nvkjkv5cujf45mztz2pjjspgdu