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Statistical And Signal Processing Concepts In Surface Metrology
1986
Optical Manufacturing, Testing and Aspheric Optics
fliis paper proposes the use of a staple two-scale model of surface roughness for testing and specifying the topographic figurs and finish of synchrotron-radiation mirrors. In this approach the effects of figure and finish are described in terns of their slope distribution and power spectrum, respectively., which are then canbined -with the system point spread function to produce a canposite image. The result can te used to predict mirror performance or to translate design requirements into
doi:10.1117/12.964495
fatcat:yabpfnoahbggtj2eajpdfjj2fa