Structural and electrical properties of swift heavy ion beam irradiated Co/Si interface

Garima Agarwal, Ankur Jain, Shivani Agarwal, D. Kabiraj, I. P. Jain
2006 Bulletin of Materials Science  
Synthesis of swift heavy ion induced metal silicide is a new advancement in materials science research. We have investigated the mixing at Co/Si interface by swift heavy ion beam induced irradiation in the electronic stopping power regime. Irradiations were undertaken at room temperature using 120 MeV Au ions at the Co/Si interface for investigation of ion beam mixing at various doses: 8 × × 10 12 , 5 × × 10 13 and 1 × × 10 14 cm -2 . Formation of different phases of cobalt silicide is
more » ... d by the grazing incidence X-ray diffraction (GIXRD) technique, which shows enhancement of intermixing and silicide formation as a result of irradiation. I-V characteristics at Co/Si interface were undertaken to understand the irradiation effect on conduction mechanism at the interface.
doi:10.1007/bf02704614 fatcat:qurksggatnh4hoykdyrqyklm4m