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Structural and electrical properties of swift heavy ion beam irradiated Co/Si interface
2006
Bulletin of Materials Science
Synthesis of swift heavy ion induced metal silicide is a new advancement in materials science research. We have investigated the mixing at Co/Si interface by swift heavy ion beam induced irradiation in the electronic stopping power regime. Irradiations were undertaken at room temperature using 120 MeV Au ions at the Co/Si interface for investigation of ion beam mixing at various doses: 8 × × 10 12 , 5 × × 10 13 and 1 × × 10 14 cm -2 . Formation of different phases of cobalt silicide is
doi:10.1007/bf02704614
fatcat:qurksggatnh4hoykdyrqyklm4m