DESIGN OF A FLAT FIELD SPECTROMETER FOR SOFT X-RAY EMISSION SPECTROSCOPY

T. TOKUSHIMA, Y. HARADA, M. WATANABE, Y. TAKATA, E. ISHIGURO, A. HIRAYA, S. SHIN
2002 Surface review and letters  
A spectrometer for soft X-ray emission spectroscopy was designed and constructed. The aims of this spectrometer are high detection efficiency and realizing the energy resolution of 1000 (E/∆E) in a compact size. To satisfy these requirements, a flat field spectrometer with a varied line spacing grating and a CCD detector was chosen. Furthermore, the configuration without the entrance slit was employed. For compact flat field spectrometers, the spectral dispersion on the detector is sometimes
more » ... tor is sometimes smaller than the spatial resolution of existing detectors restricting maximum energy resolution. The spectral dispersion on the detector was optimized to balance with the spatial resolution of CCD. Optical performance was tested with a ray-tracing program. The spectrometer covers 250-900 eV, with two gratings. Taking into account the spatial resolution of a CCD detector, the maximum energy resolution of the spectrometer is estimated to be about 1000 (E/∆E) for the beam size of 10 µm. Using the constructed spectrometer, test experiments were performed at the beamline BL27SU in SPring-8.
doi:10.1142/s0218625x02002567 fatcat:n6cfkk6axfa5xp476yi4lxtjfu