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In vitro measurement using a MEMS probe array with five-strip lines for permittivity measurement
2005
Journal of Micromechanics and Microengineering
This paper describes a single-aperture MEMS probe and a MEMS probe array for the measurement of biological properties. We designed and fabricated the single-aperture MEMS probe using surface micromachining and verified it by measuring the permittivity of a standard liquid before introducing the MEMS probe array. The actual aperture size of the single-aperture MEMS probe is only 390 µm × 80 µm, which is very small in comparison with the conventional laser-machined coaxial probe. In order to show
doi:10.1088/0960-1317/16/1/023
fatcat:piysrb2feveoxmso25dz6jt3vq